Femtosecond laser irradiation on Nd:YAG crystal: Surface ablation and high-spatial-frequency nanograting

Abstract

In this work, we systematically study the surface modifications of femtosecond (fs) laser irradiated Nd:YAG crystal in stationary focusing case (i.e., the beam focused on the target in the steady focusing geometry) or dynamic scanning case (i.e., focused fs-laser beam scanning over the target material). Micro-sized structures (e.g. micro-craters or lines) are experimentally produced in a large scale of parameters in terms of pulse energy as well as (effective) pulse number. Surface ablation of Nd:YAG surface under both processing cases are investigated, involving the morphological evolution, parameter dependence, the ablation threshold fluences and the incubation factors. Meanwhile, under specific irradiation conditions, periodic surface structures with high-spatial-frequency (<λ/2) can be generated. The obtained period is as short as 157 nm in this work. Investigations on the evolution of nanograting formation and fluence dependence of period are performed. The experimental results obtained under different cases and the comparison between them reveal that incubation effect plays an important role not only in the ablation of Nd:YAG surface but also in the processes of nanograting formation.