Optical ridge waveguides in 4H-SiC single crystal produced by combination of carbon ion irradiation and femtosecond laser ablation

Abstract

Optical ridge waveguides were fabricated in 4H-SiC single crystal by combination of 15 MeV C5+ ion irradiation and femtosecond laser ablation. The near-field modal intensity distributions exhibit the well-confined light propagation in the waveguides. A propagation loss as low as 5.1 dB/cm has been achieved at 632.8 nm for the ridge waveguide. The investigation of confocal micro-Raman spectra suggests partial transition of 4H-SiC to 6H-SiC in the irradiated region