Optical waveguides in LiTaO3 crystals fabricated by swift C5+ ion irradiation

Abstract

We report on the optical waveguides, in both planar and ridge configurations, fabricated in LiTaO3 crystal by using carbon (C5+) ions irradiation at energy of 15 MeV. The planar waveguide was produced by direct irradiation of swift C5+ ions, whilst the ridge waveguides were manufactured by using femtosecond laser ablation of the planar layer. The reconstructed refractive index profile of the planar waveguide has showed a barrier-shaped distribution, and the near-field waveguide mode intensity distribution was in good agreement with the calculated modal profile. After thermal annealing at 260 °C in air, the propagation losses of both the planar and ridge waveguides were reduced to 10 dB/cm.